Industrial X-Ray Fluorescence Analysis- New Applications and Challenges for Cryogenic Detectors

نویسندگان

  • M. Frank
  • Matthias Frank
چکیده

Cryogenic, high-resolution X-ray detectors have potential applications in industrial .X-ray fluorescence (XRF) analysis. We discuss various XRF analysis techniques currently used in the semiconductor industry, problems encountered clue to limitations of current detectors and the potential benefits of using cryogen ic detectors in these applications. We give examples of demonstration experiments, compare the perfortnance of current conventional and cryogenic X-ray spectrometers and present a II outlook. .:

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تاریخ انتشار 1998